Methods for enhanced electrical transduction and characterization of micromechanical resonators
Methods for enhanced electrical transduction and characterization of micromechanical resonators
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DOI：
10.1016/j.sna.2010.01.024
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发表时间：
2010-03-01
影响因子：
4.6
通讯作者：
Seshia, A. A.
中科院分区：
文献类型：
--
作者：
Lin, A. T-H;Lee, J. E-Y.;Seshia, A. A.
本文详细介绍了体声波模式谐振器的设计和增强的电转换在一个商业铸造MEMS工艺利用2.5 μ m的差距。电寻址硅谐振器的I-V特性通常由混合技术所固有的电容寄生控制。本文基准的各种静电驱动的平方延伸模式谐振器在空气中工作的驱动和检测原则，通过分析模型伴随着制造设备的测量，其主要目的是提高在标称工作电压下的动电流与馈通电流的比率。为了最终提高动电流与馈通电流的比值，本文提出了一种结合二次谐波电容驱动和压阻检测的新检测技术。这种新的方法被证明优于以前报道的方法，利用低至+/- 3 V的电压在空气中，提供了一个有前途的解决方案，低电压CMOS-MEMS集成。为了阐明从测量设备的信号输出的这种改进的基础上，压阻传感特定于这里报道的谐振器拓扑结构的近似分析模型也被开发和提出。(C)2010 Elsevier BV保留所有权利。
This paper details the design and enhanced electrical transduction of a bulk acoustic mode resonator fabricated in a commercial foundry MEMS process utilizing 2.5 mu m gaps. The I-V characteristics of electrically addressed silicon resonators are often dominated by capacitive parasitics, inherent to hybrid technologies. This paper benchmarks a variety of drive and detection principles for electrostatically driven square-extensional mode resonators operating in air via analytical models accompanied by measurements of fabricated devices with the primary aim of enhancing the ratio of the motional to feedthrough current at nominal operating voltages. In view of ultimately enhancing the motional to feedthrough current ratio, a new detection technique that combines second harmonic capacitive actuation and piezoresistive detection is presented herein. This new method is shown to outperform previously reported methods utilizing voltages as low as +/- 3 V in air, providing a promising solution for low voltage CMOS-MEMS integration. To elucidate the basis of this improvement in signal output from measured devices, an approximate analytical model for piezoresistive sensing specific to the resonator topology reported here is also developed and presented. (C) 2010 Elsevier B.V. All rights reserved.