Investigation of optimized experimental parameters including laser wavelength for boron measurement in photovoltaic grade silicon using laser-induced breakdown spectroscopy ☆
Investigation of optimized experimental parameters including laser wavelength for boron measurement in photovoltaic grade silicon using laser-induced breakdown spectroscopy ☆
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DOI：
10.1016/j.sab.2010.04.014
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发表时间：
2010-08
期刊：
影响因子：
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通讯作者：
S. Darwiche;M. Benmansour;N. Eliezer;D. Morvan
中科院分区：
文献类型：
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作者：
S. Darwiche;M. Benmansour;N. Eliezer;D. Morvan
光伏级硅中的硼和其他杂质的定量研究使用LIBS技术，注意所采用的激光波长，时间参数和环境气体的性质。发现激光波长对工艺的性能具有中等影响，而吹扫气体的类型和时间参数对硼光谱发射的信号背景比（SBR）具有强烈影响，所述信号背景比用于确定硅中的硼浓度。这三个参数不是独立的，这意味着对于每种不同的吹扫气体，观察到不同的最佳时间参数。还从390.5nm硅发射线的斯塔克加宽计算电子密度，以便更好地理解当使用不同气体和选通参数时观察到的不同性能。使用经认证的标准品和不同的吹扫气体，同时使用针对该气体优化的时间参数，制作用于硅中硼测量的校准曲线。通过比较校准曲线，确定氩气上级氦气或空气用作具有UV激光器的分析室吹扫气体。
The quantification of boron and other impurities in photovoltaic grade silicon was investigated using the LIBS technique with attention to the laser wavelength employed, temporal parameters, and the nature of the ambient gas. The laser wavelength was found to have a moderate effect on the performance of the process, while the type of purge gas and temporal parameters had a strong effect on the signal-to-background ratio (SBR) of the boron spectral emission, which was used to determine the boron concentration in silicon. The three parameters are not independent, meaning that for each different purge gas, different optimal temporal parameters are observed. Electron density was also calculated from Stark broadening of the 390.5nm silicon emission line in order to better understand the different performances observed when using different gases and gating parameters. Calibration curves were made for boron measurement in silicon using certified standards with different purge gases while using the temporal parameters which had been optimized for that gas. By comparing the calibration curves, it was determined that argon is superior to helium or air for use as the analysis chamber purge gas with an UV laser.