Pulsed excimer laser deposition of Permalloy thin films: structural and electrical properties
Pulsed excimer laser deposition of Permalloy thin films: structural and electrical properties
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DOI：
10.1051/epjap:2008091
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发表时间：
2008-06
影响因子：
1
通讯作者：
A. Guittoum;A. Layadi;T. Kerdja;S. Lafane;S. Bouterfaia
中科院分区：
文献类型：
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作者：
A. Guittoum;A. Layadi;T. Kerdja;S. Lafane;S. Bouterfaia
研究了厚度对坡莫合金薄膜Ni 8iFe 19（Py）的结构和电学性能的影响。采用KrF准分子激光器（波长248 nm，脉宽30 ns），能量密度3 J/cm 2，在室温下在Si（100）衬底上沉积坡莫合金薄膜。厚度范围为25 nm至250 nm。显微照片显示形成了尺寸在4.6 μm和0.24 μm之间的不规则液滴。我们发现，所有的样品都呈现出强烈的（100）纹理。晶格常数（a）随着厚度的增加而单调增加。此外，我们注意到，对于低于127 nm的厚度，晶格常数（a）低于体值，然而，对于大于127 nm的厚度，（a）高于体值。随着厚度从45 nm增加到250 nm，晶粒尺寸从30 nm增加到54 nm。不同的贡献的电阻率作为一个函数的Py厚度进行了研究。
We report on the effect of thickness on the structural and electrical properties of permalloy thin films Ni 8i Fe 19 (Py). Permalloy films were deposited onto Si(100) substrates at room temperature using a KrF (wavelength of 248 nm, pulse duration of 30 ns) excimer laser at a fluence of 3 J/cm 2 . The thickness ranges from 25 nm to 250 nm. The micrographs reveal the formation of irregular droplets with dimensions between 4.6 μm and 0.24 μm. We show that all samples presented a strong (100) texture. The lattice constant (a) monotonously increases with increasing thickness. Also, we note that for thickness below 127 nm, the lattice constant (a) is lower than the bulk value, however, for thickness more than 127 nm, (a) is higher than a bulk . The grain size increases from 30 nm to 54 nm as the thickness increases from 45 nm to 250 nm. The different contributions to the electrical resistivity are investigated as a function of the Py thickness.