The use of fluoropolymers to protect semiconductor materials
The use of fluoropolymers to protect semiconductor materials
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DOI：
10.1016/s0022-1139(03)00103-9
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发表时间：
2003-07-01
影响因子：
1.9
通讯作者：
Extrand, CW
中科院分区：
文献类型：
--
作者：
Extrand, CW
含氟聚合物是微电子工业中许多材料完整性管理应用的首选材料。本简要概述讨论了氟聚合物的常见类型和制冷剂加工环境的严格要求。含氟聚合物用于各种各样的流体和装置处理应用中，因为它们提供了独特的韧性组合。纯度和耐化学性。(C)2003 Elsevier B.V.保留所有权利。
Fluoropolymers are the materials of choice for many materials integrity management applications within the microelectronics industry. This brief overview discusses common types of fluoropolymers and the stringent requirements of semiconductor-proces sing environments. Fluoropolymers are used in a wide variety of such fluid and device handling applications because they provide a unique combination of toughness. purity. and chemical resistance. (C) 2003 Elsevier B.V. All rights reserved.