RF MEMS tunable filter using micro fixed–fixed beam
RF MEMS tunable filter using micro fixed–fixed beam
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DOI：
10.1002/mop.24981
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发表时间：
2010-03
影响因子：
1.5
通讯作者：
Md. Fokhrul Islam;M. Mohd Ali;B. Majlis
中科院分区：
文献类型：
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作者：
Md. Fokhrul Islam;M. Mohd Ali;B. Majlis
在本文中，设计、模拟和制造了一种采用微型固定-固定梁结构的可调谐带通滤波器。该滤波器采用微机械电容桥设计，具有原始的无源拓扑结构。所制造的滤波器芯片面积为12 × 3 mm2，在整个工作频段内实现了小于2 dB的插入损耗和小于-15 dB的回波损耗，从而将滤波器中心频率在8.76至9.8 GHz之间调整了11%。 © 2010 Wiley periodicals, Inc. Microwave Opt Technol Lett 52: 592–597, 2010；在线发表于 Wiley InterScience (www.interscience.wiley.com)。 DOI 10.1002/mop.24981
In this article, a tunable bandpass filter using micro fixed‐fixed beam structure is designed, simulated, and fabricated. The filter is designed by micromachined capacitive bridges, with an original passive topology. The fabricated filter occupies a chip area of 12 × 3 mm2 and achieved an insertion loss of less than 2 dB and return loss of less than −15 dB throughout the operation band, thereby tuning the filter centre frequency by 11% between 8.76 and 9.8 GHz. © 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 592–597, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24981