On the energy distribution and angular distribution of sputtered particles
On the energy distribution and angular distribution of sputtered particles
复制标题
关于溅射粒子的能量分布和角度分布
DOI：
10.1080/00337578008210025
复制
发表时间：
1980
影响因子：
1
通讯作者：
J. Sanders
中科院分区：
文献类型：
--
作者：
H. Roosendaal;J. Sanders
本文考虑了固体中碰撞级联动量反冲密度的各向异性对溅射粒子能量和角分布的影响。各种溅射机制进行了讨论。对于其中一些机制，这种各向异性导致能量分布偏离e−2渐近形式，并导致角分布不对称，这是射弹入射角的函数。
Abstract The influence of the anisotropy of the momentum recoil density of collision cascades in solids on the energy and angular distribution of sputtered particles is considered. Various sputtering mechanisms are discussed. For some of those mechanisms this anisotropy leads to deviations from a e−2 asymptotic form in the energy distribution and to an asymmetry in the angular distribution as a function of the angle of incidence of the projectile.