Simple fabrication of highly sensitive capacitive pressure sensors using a porous dielectric layer with cone-shaped patterns
Simple fabrication of highly sensitive capacitive pressure sensors using a porous dielectric layer with cone-shaped patterns
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DOI：
10.1016/j.matdes.2020.109203
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发表时间：
2021-01-01
影响因子：
8.4
通讯作者：
Oh, Je Hoon
中科院分区：
文献类型：
--
作者：
Kim, Yeongjun;Yang, Hyeondong;Oh, Je Hoon
本研究旨在提高采用多孔结构和锥形图案组成的电容式压力传感器的传感器的灵敏度。本研究介绍了一种简单快速的制造方法，利用微波照射含有聚二甲基硅氧烷（PDMS）和牺牲溶剂的乳液来生产多孔结构和锥形图案。通过这种方法，可以在几分钟内简单地制造出多孔PDMS介电层。通过增强变形能力和增加外部压力下的介电常数，大大提高了灵敏度。研究了图案距离的影响，图案距离为600μm的传感器表现出约5kPa(-1)的极高灵敏度。此外，还通过有限元分析研究了图案的纵横比和清晰度的影响。最后，我们使用传感器阵列和手指附着传感器展示了传感器的性能，它们表现出了足够的性能，可用于适用于人造皮肤、手术机器人和压力监测系统等的可穿戴设备。 (C) 2020 作者。由爱思唯尔有限公司出版
This study aims to improve the sensitivity of sensors using porous structures and cone-shaped patterns in the composition of a capacitive pressure sensor. A simple and rapid fabrication method for the production of porous structures and cone-shaped patterns using microwave irradiation of emulsions containing polydimethylsiloxane (PDMS) and a sacrificial solvent is introduced in this study. Through this method, a porous PDMS dielectric layer could be simply fabricated within a few minutes. The sensitivity was greatly improved by both enhancing deformability and increasing the dielectric constant under the external pressure. The effect of pattern distance was investigated, and the sensor with the pattern distance of 600 mu m showed a remarkably high sensitivity of approximately 5 kPa(-1). Moreover, the effect of aspect ratio and sharpness of the patterns were also studied through a finite element analysis. Finally, we demonstrated the performance of the sensor using a sensor array and finger attached sensors, and they showed sufficient performance for use in wearable devices applicable to artificial skin, surgical robots, and pressure monitoring systems, among others. (C) 2020 The Authors. Published by Elsevier Ltd.