The production of active plasma species for surface treatments
The production of active plasma species for surface treatments
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用于表面处理的活性等离子体物质的生产
DOI：
10.1088/0022-3727/30/16/002
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
A. Ricard
中科院分区：
文献类型：
--
作者：
A. Ricard
等离子体技术正在迅速发展，尽管仍需要大量的研究和开发。现场诊断，如发射光谱，建立了控制等离子体过程。描述了两个关于使用和的流动放电后等离子体处理聚合物和钢表面的实验。O和N原子密度的诊断与表面活性（对于聚合物）和涂层形成（对于钢）相关。通过少量注入或少量注入的方法，实现了对流动排放和后排放反应器玻璃管壁的中毒。我们观察到，在这两种情况下，主要气体的原子密度都有明显的增加。
Plasma technology is progressing rapidly, although there is still a need for much research and development. In situ diagnostics such as emission spectroscopy are set up to control the plasma processes. Two experiments concerning treatments of polymer and steel surfaces using a flowing post-discharge plasma of and are described. The diagnostics of O and N atom densities have been correlated to the surface activity (for the polymer) and to the coating formation (for steel). Poisoning of the glass tube walls of the flowing discharge and post-discharge reactors was achieved by introducing a little into or a little into . We observed a detectable increase in density of atoms of the dominant gas species in both cases.