A new sensitivity improving approach for mass sensors through integrated optimization of both cantilever surface profile and cross-section
A new sensitivity improving approach for mass sensors through integrated optimization of both cantilever surface profile and cross-section
复制标题
通过悬臂表面轮廓和横截面的综合优化，提高质量传感器灵敏度的新方法
DOI：
10.1016/j.snb.2014.09.033
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发表时间：
2015
期刊：
影响因子：
--
通讯作者：
Shutian Liu
中科院分区：
文献类型：
--
作者：
Jian Zhao;Yongcun Zhang;Renjing Gao;Shutian Liu
压电谐振式质量传感器的灵敏度在材料和颗粒分析领域具有重要意义。与传统的几何降维和结构修改方法不同，提出了一种同时修改悬臂梁表面轮廓和截面形状以优化其刚度和质量分布的方法。在了解结构参数对谐振频率的影响的基础上，引入带槽变截面梯形悬臂梁作为关键弹性元件，设计并制作了一种新型压电谐振式质量传感器。通过对悬臂梁振动的有限元分析，建立了带槽梯形悬臂梁质量传感器的灵敏度分析模型，系统地分析了槽型和型面参数对灵敏度提高的影响。该传感器的实验和模拟灵敏度分别为33.7 × 103 Hz/g和38.0 × 103 Hz/g，比传统矩形悬臂梁传感器的9.8 × 103 Hz/g提高了近387.8%。更重要的是，该传感器还具有分布质量检测的高灵敏度的特点，是矩形悬臂梁传感器的2.92倍。最后，验证了该方法的可行性和有效性.
Sensitivity is of great importance for piezoelectric resonance mass sensors in the fields of material and particle analyzing. Different from the custom used methods such as geometric dimension reduction and configuration modification, a new sensitivity improving method was proposed by simultaneously modifying both the surface profile and the cross-section type of the cantilever to optimize its stiffness and mass distribution. Knowing the effects of the structural parameters on the resonance frequency, a novel piezoelectric resonant mass sensor was designed and fabricated by introducing the grooved trapezoidal cantilever with variable cross-section as the key elastic element. Through the cantilever vibration analysis by the finite element method, the sensitivity analyzing model for the grooved trapezoidal cantilever mass sensor was established, with which, the influence of the groove and profile parameters on the sensitivity improvement was systematically analyzed. The experimental and simulated sensitivities of the proposed sensor are 33.7 × 103Hz/g and 38.0 × 103Hz/g respectively, which are nearly 387.8% greater than that of the custom rectangular cantilever sensor of 9.8 × 103Hz/g. More importantly, the proposed sensor also possesses the character of high sensitivity for distributed mass detection, which is 2.92 times that of the rectangular cantilever sensor. Finally, the feasibility and effectiveness of the newly proposed sensitivity improving method was validated.