Investigation of mid-infrared rapid heating of a carbide-bonded graphene coating and its applications in precision optical molding.
Investigation of mid-infrared rapid heating of a carbide-bonded graphene coating and its applications in precision optical molding.
复制标题
碳化物石墨烯涂层的中红外快速加热及其在精密光学成型中的应用研究。
DOI：
10.1364/oe.405603
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发表时间：
2020
期刊：
影响因子：
3.8
通讯作者：
A. Yi
中科院分区：
文献类型：
--
作者：
Lin Zhang;A. Yi
石墨烯与电磁波在从紫外线到远红外的广泛范围内强烈相互作用，使石墨烯涂层适用于各种应用。在这项研究中，一种新的局部快速加热技术在快速精密光学成型中实现，该技术利用带有碳化物结合石墨烯涂层的微图纹硅冲压件，通过吸收中红外光辐射直接加热。石墨烯网络作为一种获取热能、提高模具表面抗粘附性的功能涂层，可以在几秒钟内将模具表面快速加热（高达18.16 K/s），并在大面积上均匀地加热到玻璃化转变温度以上。由于石墨烯涂层厚度约为数十纳米（~ 45纳米），因此可以将快速精密表面成型过程缩短到数十秒。此外，通过反复热循环研究了石墨烯包覆硅片的热响应和可重复性。这种新型的快速精密表面成型技术已经成功地测试了从硅模具到热塑性基板的高精度复制光栅结构和周期性图案。与传统方法相比，该方法可以在更短的周期时间和更低的能耗下获得更高的复制保真度。
Graphene interacts with electromagnetic waves strongly in a wide range from ultra-violet to far-infrared, making the graphene coating suitable for a variety of applications. In this study, a novel localized rapid heating technique utilizing micro-patterned silicon stampers with carbide-bonded graphene coating, which directly heats up by absorbing mid-infrared light radiation, is implemented in rapid precision optical molding. The graphene network, as a functional coating to obtain thermal energy and improve the anti-adhesion of the mold surface, can heat up the mold surface rapidly (up to 18.16 K/s) and evenly above glass transition temperature over a large area within several seconds. Since the graphene coating was around tens of nanometers (∼45 nm) thick, the rapid precision surface molding process can be shortened into tens of seconds. Furthermore, the thermal response and repeatability of the graphene coated silicon wafer is investigated by repeated thermal cycling. This novel rapid precision surface molding technique is successfully tested to replicate grating structures and periodic patterns from silicon molds to thermoplastic substrates with high accuracy. Compared with conventional methods, this new approach can achieve much higher replication fidelity with a shorter cycle time and lower energy consumption.