The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor
The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor
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DOI：
10.1016/s0924-4247(98)00238-6
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发表时间：
1999-03-30
影响因子：
4.6
通讯作者：
Santiago-Avilés, JJ
中科院分区：
文献类型：
--
作者：
Gongora-Rubio, M;Solá-Laguna, LM;Santiago-Avilés, JJ
For certain applications the small size characteristics of MEMS structures can be traded off for low cost production and high manufacturing yields. This is the realm of meso-scale (intermediate scale) electromechanical systems. Low temperature co-fired ceramic tape materials offers the potential of emulating a great deal of silicon MEMS technology at the meso scale level. In this article we show the design, construction, characterization and modeling of a thermistor based flow sensor totally constructed using LTCC tapes and the hybrid microelectronics technology. (C) 1999 Elsevier Science S.A. All rights reserved.
