Multilayered vacuum-arc nanocomposite TiN/ZrN coatings before and after annealing: Structure, properties, first-principles calculations
Multilayered vacuum-arc nanocomposite TiN/ZrN coatings before and after annealing: Structure, properties, first-principles calculations
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DOI：
10.1016/j.matchar.2017.10.016
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发表时间：
2017-12
影响因子：
4.7
通讯作者：
A. Pogrebnjak;V. Ivashchenko;O. Bondar;V. Beresnev;O. Sobol;K. Załȩski;S. Jurga;E. Coy;P. Konarski;B. Postolnyi
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文献类型：
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作者：
A. Pogrebnjak;V. Ivashchenko;O. Bondar;V. Beresnev;O. Sobol;K. Załȩski;S. Jurga;E. Coy;P. Konarski;B. Postolnyi
在氮气气氛下，采用连续真空弧沉积技术制备了Ti和Zr靶材的纳米级多层TiN/ZrN薄膜。利用XRD、STEM、HRTEM、SIMS等多种现代分析方法，结合纳米压痕和摩擦学测试结果，对薄膜的性能进行了研究。为了解释沉积多层膜的力学性能，对TiN（111）、ZrN（111）结构和TiN(111)/ZrN（111）多层膜进行了第一性原理计算。为了研究热退火的影响，将几个样品在700℃的空气中退火。所有沉积的样品都是高度多晶的，具有相当大的20-25 nm晶体。晶面是非常有序的，并表现出极好的协调生长。未退火涂层的纳米硬度和弹性模量分别达到42 GPa和348 GPa。在700℃的空气中退火导致多层涂层部分氧化，但涂层未氧化部分的硬度与初始涂层一样高。所有镀层均表现出良好的耐磨性。
Nanoscale multilayered TiN/ZrN films were deposited using sequential vacuum-arc deposition of Ti and Zr targets in a nitrogen atmosphere. Studies of film's properties were carried out using various modern methods of analysis, such as XRD, STEM, HRTEM, SIMS combined with results of nanoindentation and tribological tests. To interpret the mechanical properties of the deposited multilayer films first-principles calculations of TiN(111), ZrN(111) structures and TiN(111)/ZrN(111) multilayer were carried out. To study the influence of thermal annealing, several samples were annealed in air at the temperature 700 °C. All deposited samples were highly polycrystalline with quite large 20–25 nm crystals. The crystalline planes were very ordinated and demonstrated an excellent coordinated growth. The nanohardness and elastic modulus of non-annealed coatings reached 42 GPa and 348 GPa, respectively. Annealing in air at the temperature 700 °C led to partial oxidation of the multilayered coatings, however hardness of the non-oxidized part of the coatings remained as high, as for initial coatings. All deposited coatings demonstrate good wear resistance.