<100> n-type metal-oxide- semiconductor field-effect transistor- embedded microcantilever sensor for observing the kinetics of chemical molecules interaction

<100> n-type metal-oxide- semiconductor field-effect transistor- embedded microcantilever sensor for observing the kinetics of chemical molecules interaction
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Appl. Phys. Lett.
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作者:
Jian Wang;Wengang Wu;Ying Huang; Yilong Hao;

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