A Flexible Microassembly System for Automated Fabrication of MEMS Sensors
A Flexible Microassembly System for Automated Fabrication of MEMS Sensors
复制标题
用于自动制造 MEMS 传感器的灵活微装配系统
DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
Liguo Chen
中科院分区：
文献类型：
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作者：
Hui Xie;W. Rong;Lining Sun;Liguo Chen
MEMS传感器的批量微组装受到人工操作的限制，需要经过专门培训的技术人员。为了在降低生产成本的同时获得高质量的产品，开发了一种用于MEMS传感器自动键合的柔性微组装系统。该系统由一组自主模块组成，这些模块可以根据不同尺寸的MEMS传感器调整其结构和功能，包括定位平台、显微镜成像系统、柔性微机械臂、加热器、夹具、补给站和辅助系统。由于显微镜光学对微装配的基本重要性，光机电设计对集成系统的发展至关重要。本文介绍了该系统光电设计中的主要方法学问题。提出了一种基于小波的显微聚焦测量方法和一种改进的Smith预测器控制方案，以减小视觉系统的固有时延。采用一维智能力传感器对交互力进行感知和控制。为了实现自动操作，开发了一个控制系统，包括任务规划层和实时执行层。通过进一步的实验验证了柔性微装配系统的生产效率
Batch microassembly of MEMS sensors is limited by the manual manipulation required specially trained technicians. To reduce the production costs and simultaneously obtain high production quality, a flexible microassembly system for automated bonding of MEMS sensors is developed. The system consists of a set of autonomous modules that can adapt their structures and functions to various sizes of MEMS sensors, including positioning stages, a microscopy imaging system, a flexible micromanipulator, a heater, a fixture, a supply station and auxiliary systems. Optomechatronic design is essential to the development of integrated systems due to the basic importance of microscope optics to microassembly. In this paper, major methodology issues in optomechatronic design of this system are introduced. A wavelet-based microscopic focus measure and a control scheme with a modified Smith predicator to decrease the inherent time delay of vision system are presented. A smart force sensor with one dimension is employed to sense and control the interactive force. To perform manipulations automatically, a control system, including a task planning level and a real-time execution level, is developed. The productivity of the flexible microassembly system is validated by further experiments
DOI：
10.1002/cyto.990120302
发表时间：
1991-01-01
期刊：
CYTOMETRY
影响因子：
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作者：
FIRESTONE, L;COOK, K;PRESTON, K
通讯作者：
PRESTON, K