Calibration of an interferometric on-machine probing system on an ultra-precision turning machine
Calibration of an interferometric on-machine probing system on an ultra-precision turning machine
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DOI：
10.1016/j.measurement.2017.12.038
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发表时间：
2018-03-01
期刊：
影响因子：
5.6
通讯作者：
Gao, Feng
中科院分区：
文献类型：
--
作者：
Li, Duo;Tong, Zhen;Gao, Feng
表面测量是进一步提高超精密加工精度和效率的基础。先进的在机测量（OMM）正在发展成为自主和智能制造的关键技术。本研究将干涉式测头系统整合于超精密车床上。然而，由于机床工作环境相对恶劣，表面测量仪器的计量特性会偏离实验室测试结果。为了提高在机测量系统的性能，有必要对OMM系统进行标定和系统误差补偿。针对干涉式单点OMM的特点，分析了三种主要的误差源，包括机床振动、机床运动误差和直线度误差。对于在机振动，首先从理论上研究了采样频率、扫描参数、振动频率和感兴趣的形貌频率之间的关系。进行静态和扫描振动测试，以选择适当的采样频率。利用提出的运动学误差建模、测量和补偿方法，对机床扫描误差进行映射，实现OMM校正。通过在机器上测量径向分布的台阶高度样品来进行响应曲线的校准和线性误差校正。实验结果证明了所提出的标定方法的有效性和OMM的有效性。校准过程后，OMM结果与校准的离线测量结果吻合良好。
Surface measurement is fundamental to further enhance accuracy and efficiency in ultra-precision machining. Advanced on-machine measurement (OMM) is evolving as the key enabling technology for autonomous and intelligent manufacturing. The present work integrates an interferometric probing system on an ultra-precision turning machine. However, due to relatively harsh environment in the machine tools, metrology characteristics of surface measuring instrument would deviate from those tested in laboratories. In order to improve the performance of on-machine measurement system, it is necessary to calibrate the OMM system and compensate the systematic errors. Three major error sources, including on-machine vibration, machine tool kinematic errors, and linearity errors are investigated according to the characteristics of interferometric single point OMM. For onmachine vibration, a theoretical study of the relationship between sampling frequency, scanning parameters, vibration frequency and topography frequencies of interest is first presented. Static and scanning vibration tests are performed in order to select the proper sampling frequency. Machine scanning error is mapped for OMM correction with the proposed kinematic error modelling measurement and compensation method. Calibration of the response curve and linearity error correction is conducted by measuring a radially distributed step height sample on the machine. Experimental investigation is conducted which proves the validity of proposed calibration methodology and the effectiveness of OMM. After the calibration process, OMM results agree well with calibrated offline measurements.