An alternative solution to improve sensitivity of resonant microcantilever chemical sensors:: comparison between using high-order modes and reducing dimensions
An alternative solution to improve sensitivity of resonant microcantilever chemical sensors:: comparison between using high-order modes and reducing dimensions
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DOI：
10.1016/j.snb.2004.11.086
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发表时间：
2005-07-22
影响因子：
8.4
通讯作者：
Rebière, D
中科院分区：
文献类型：
--
作者：
Lochon, F;Dufour, I;Rebière, D
通过测量涂有敏感层的硅微悬臂梁谐振频率的变化，可以获得具有竞争力的化学微传感器。实际上，这种微传感器应用于高谐振频率器件时，其灵敏度得到了提高。通常，为了提高谐振频率，使用较小的微悬臂梁。通过减小微结构尺寸来提高固有频率的限制往往是由于挠度测量原理的限制。此外，在非常小的表面上获得可复制的敏感涂层也很困难。为了在不减小微结构尺寸的情况下获得高频对应的高灵敏度，可以考虑采用高阶弯曲模态。本文论证了谐振微悬臂式化学传感器的理论性能主要取决于谐振频率值，而不是模态阶数。实验还证实了采用高阶模态提高谐振频率的优点。(c) 2004 Elsevier B.V.版权所有
By measuring shifts in the resonant frequency of a silicon microcantilever coated with a sensitive layer, it is possible to obtain a competitive chemical microsensor. In fact, the sensitivity of such a microsensor is improved when used in high resonant frequency device. Usually, to increase the resonant frequency, smaller microcantilevers are used. The limitation on increasing the natural frequency by reducing the microstructure size is often due to the limitation of the deflection measurement principle. Furthermore, it could also be difficult to obtain reproducible sensitive coatings on very small surfaces. In order to achieve high sensitivities corresponding to high frequencies without decreasing the microstructure size, high-order flexural modes can be considered. In this paper, it is demonstrated that the theoretical performance of the resonant microcantilever chemical sensor is essentially due to the resonant frequency value and not due to the mode order. The advantages of increasing the resonant frequency by using high-order modes is also confirmed experimentally. (c) 2004 Elsevier B.V. All rights reserved.