Adual Axis Gas Gyroscope Based on Convective and Thermo-Resistive Effects in Silicon with Low Thermal-Induced Stress Sensing Element
Adual Axis Gas Gyroscope Based on Convective and Thermo-Resistive Effects in Silicon with Low Thermal-Induced Stress Sensing Element
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基于硅对流和热阻效应的双轴气体陀螺仪，具有低热致应力传感元件
DOI：
10.1109/memsys.2006.1627869
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
S. Sugiyama
中科院分区：
文献类型：
--
作者：
D. Dao;V. Dau;T. Shiozawa;H. Kumaga;S. Sugiyama
本文介绍了一种双轴半导体气体陀螺仪的设计、仿真和制作。该传感器由压电泵和微型热敏元件组成，封装在直径为14 mm、长度为25 mm的铝壳中。提出了传感元件和喷嘴孔的新结构。该传感器已被制造和表征。陀螺仪在X轴和Y轴的测量灵敏度分别为0.082mV/deg/sec和0.078mV/deg/sec。两个输入轴之间的交叉灵敏度小于0.26%。测量的非线性小于0.5% F.S.。测量的分辨率为0.5度/秒。
This paper presents the design, simulation and fabrication of a dual axis semiconductor gas gyroscope. The sensor configuration consists of a piezoelectric pump and a micro thermal sensing element, packaged in an aluminum case with diameter and length of 14mm and 25mm, respectively. Novel structures of the sensing element and of the nozzle orifice are presented. The sensor has been fabricated and characterized. The measured sensitivities of the gyroscope for the X- and Y-axis were 0.082mV/deg/sec and 0.078mV/deg/sec, respectively. The cross-sensitivities between the two input axes were less than 0.26%. Non-linearity was measured to be smaller than 0.5% F.S. The resolution was measured to be 0.5deg/sec.