Field emission from well-aligned, patterned, carbon nanotube emitters
Field emission from well-aligned, patterned, carbon nanotube emitters
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DOI：
10.1063/1.126164
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发表时间：
2000-03-27
影响因子：
4
通讯作者：
Yamakawa, H
中科院分区：
文献类型：
--
作者：
Murakami, H;Hirakawa, M;Yamakawa, H
我们开发了一种在玻璃基板上制作排列良好、图案化的碳纳米管场致发射体的工艺。该工艺包括在玻璃衬底上沉积和图案化镍基金属线，然后通过偏压增强微波等离子体化学气相沉积来生长碳纳米管发射器。在排列良好的碳纳米管发射器上实现了1.2V/μ m的开启场和在3V/μ m下1 mA/cm（2）的发射电流。目前正在进行的阴极射线管照明元件的测试表明寿命超过10000小时。(C)2000年美国物理学会。【S0003-6951（00）03713-X】。
We have developed a process to fabricate well-aligned, patterned, carbon nanotube field emitters on glass substrates. The process consists of depositing and patterning a nickel-based metal line on the glass substrate followed by a bias-enhanced microwave plasma chemical vapor deposition to grow carbon nanotube emitters. A turn-on field of 1.2 V/mu m, and emission currents of 1 mA/cm(2) at 3 V/mu m were achieved on well-aligned carbon nanotube emitters. A test of cathode-ray tube lighting elements now underway suggests a lifetime of exceeding 10 000 h. (C) 2000 American Institute of Physics. [S0003-6951(00)03713-X].