Micromachined silicon antennas
Micromachined silicon antennas
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微机械硅天线
DOI：
10.1109/icmmt.1998.768282
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发表时间：
1998
期刊：
影响因子：
--
通讯作者：
P. Hall
中科院分区：
文献类型：
--
作者：
Q. Chen;V. Fusco;M. Zheng;P. Hall
本文研究了在硅微带贴片天线和槽环天线辐射边缘的硅沟槽边缘形成悬臂导体的一种新的工艺过程的效果。已经发现，从晶片的背面产生的具有悬臂导体的沟槽可以有效地降低衬底的有效介电常数，改善辐射图案并增强辐射。
The effects of a new processing procedure for creating cantilevered conductors at edges of silicon trenches at radiating edges of a silicon microstrip patch antenna and slot loop antenna are examined in this paper. It has been found that trenches with cantilevered conductors generated from the back side of a wafer can effectively reduce the effective dielectric constant of the substrate, improve radiation patterns and enhance radiation.