Analytical and finite element model pull-in study of rigid and deformable electrostatic microactuators
Analytical and finite element model pull-in study of rigid and deformable electrostatic microactuators
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DOI：
10.1088/0960-1317/14/1/308
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发表时间：
2004-01-01
影响因子：
2.3
通讯作者：
Wu, XT
中科院分区：
文献类型：
--
作者：
Cheng, J;Zhe, J;Wu, XT
提出了一种通用的理论和方法，并用于分析刚性和可变形的静电驱动器系统的静态行为与各种电极配置。该方法利用基于电容的广义方程，为复杂系统的吸合分析提供了一个简单而省时的平台。分析结果表明，刚性静电驱动器的行程范围可以通过操纵电极的形状来扩展。甚至整个行程范围（100%）可以通过一般的幂函数形状的电极来实现。研究发现，部分驱动可以避免吸合，并达到与牺牲偏置电压的全行程范围。分析了部分电极悬臂矩形和圆形驱动器的结构，并与仿真结果进行了比较。各种执行器的动作曲线。也是用这种方法得到的。结果表明，部分驱动曲线与全驱动曲线完全一致，不同电极形状的悬臂梁扭转驱动器都遵循相同的驱动曲线。对三电极结构的可变形静电致动器的吸合行为进行了理论分析和有限元模拟。分析结果与有限元模拟结果一致。结果表明，这三种电极配置的归一化变形曲线与电极的几何形状和电压无关。该分析方法考虑了边缘场。
A general theory and method are presented and employed to analyze the static behaviors of rigid and deformable electrostatic actuator systems with various electrode configurations. This method utilizes capacitance-based generalized equations and provides an easy and time-saving platform over complicated coupled finite element method (FEM) simulations for pull-in analysis of a complex system. Analytical results show that the travel range of rigid electrostatic actuators can be extended by manipulating the shape of the electrode. Even a full travel range (100%) can be realized by a general power function shaped electrode. It is found that the partial actuation can avoid pull-in and reach full travel ranges with the sacrifice of the bias voltage. Analytical results of cantilever rectangular and circular actuators with a partial electrode are in good agreement with simulation results. Actuation curves of various actuators. are also derived using this method. It is found that partial actuation curves are exactly the same as full actuation curves, and all types of cantilever torsion actuators with various electrode shapes follow the same actuation curve. Analytical and FEM simulations are carried out to study the pull-in behavior of deformable electrostatic actuators of three electrode configurations. The analytical results agree with FEM simulation results. It is found that the normalized deformation curves of these three electrode configurations are independent of geometry and voltage. The fringing field is considered in this analytical method.