High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers
High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers
复制标题
用于 3 模光声参量放大器的高品质因数毫克级硅机械谐振器
DOI：
10.1063/1.4812731
复制
发表时间：
2013
影响因子：
3.2
通讯作者：
C. Michel
中科院分区：
文献类型：
--
作者：
F. Torres;P. Meng;L. Ju;Chunnong Zhao;D. Blair;Kaikai Liu;S. Chao;M. Martyniuk;I. Roch‐Jeune;R. Flaminio;C. Michel
基于先进引力波探测器首次预测的现象，毫克级谐振器已被证明适合于创建三模光声参数放大器。为了实现实用的光声参数器件，需要高质量的因数谐振器。我们设计了毫米级硅谐振器，其扭转振动模式的频率在105-106 Hz范围内，用于观察紧凑桌面系统中的三模光声相互作用。我们的设计结合了一个隔离级，最大限度地减少了光学涂层的声损失。我们观察到，在室温和10 - 3pa压力下，模式频率为401.5 kHz时，质量因子为7.5 × 105。我们通过映射谐振器的振幅响应并与有限元模型进行比较来确认模态振型。该研究有助于开发用于新型高灵敏度信号换能器和量子测量系统的三模光声参数放大器。
Milligram-scale resonators have been shown to be suitable for the creation of 3-mode optoacoustic parametric amplifiers, based on a phenomena first predicted for advanced gravitational-wave detectors. To achieve practical optoacoustic parametric devices, high quality factor resonators are required. We present millimetre-scale silicon resonators designed to exhibit a torsional vibration mode with a frequency in the 105–106 Hz range, for observation of 3-mode optoacoustic interactions in a compact table-top system. Our design incorporates an isolation stage and minimizes the acoustic loss from optical coating. We observe a quality factor of 7.5 × 105 for a mode frequency of 401.5 kHz, at room temperature and pressure of 10–3 Pa. We confirmed the mode shape by mapping the amplitude response across the resonator and comparing to finite element modelling. This study contributes to the development of 3-mode optoacoustic parametric amplifiers for use in novel high-sensitivity signal transducers and quantum measu...