X-ray standing wave and reflectometric characterization of multilayer structures
X-ray standing wave and reflectometric characterization of multilayer structures
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DOI：
10.1103/physrevb.63.245409
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发表时间：
2001-06-15
影响因子：
3.7
通讯作者：
Dev, BN
中科院分区：
文献类型：
--
作者：
Ghose, SK;Dev, BN
本文提出了一种用x射线驻波表征合成周期多层膜微结构的方法。结果表明，X射线反射法（XRR）和X射线驻波法（XSW）相结合的多层膜分析技术可以克服各自技术在微结构分析中的不足。虽然界面粗糙度是更准确地确定了XRR技术，层的组成是更准确地确定了XSW技术，其中一个元素是直接识别其特征发射。这些方面的解释与20周期的Pt/C多层的一个例子。的C层的组成，由于Pt溶解在C层，PtxCl 1-x，是由XSW技术确定。在XSW分析中，当假定存在于C层中的Pt的全部量在加宽的界面内时，这导致较大的界面粗糙度值，与通过XRR技术确定的那些不一致。约束的界面粗糙度值的XRR技术所确定的那些需要一个额外的量的溶解的Pt在C层中解释的Pt荧光产率激发的驻波场。该分析提供了C层的平均组成PtxCl 1-x。
A microstructural characterization of synthetic periodic multilayers by x-ray standing waves is presented. It is show that the analysis of multilayers by combined x-ray reflectometry (XRR) and x-ray standing-wave (XSW) techniques dan overcome the deficiencies of the individual techniques in microstructural analysis. While interface roughnesses are more accurately determined by the XRR technique, the layer composition is more accurately determined by the XSW technique, where an element is directly identified by its characteristic emission. These aspects are explained with an example of a 20-period Pt/C multilayer. The composition of the C layers due to Pt dissolution in the C layers, PtxCl1-x, is determined by the XSW technique. In the XSW analysis, when the entire amount of Pt present in the C layers is assumed to be within the broadened interface, this leads to larger interface roughness values, inconsistent with those determined by the XRR technique. Constraining the interface roughness values to those determined by the XRR technique requires an additional amount of dissolved Pt in the C layers to explain the Pt fluorescence yield excited by the standing-wave field. This analysis provides the average composition PtxCl1-x of the C layers.