"Top-down" and "bottom-up" strategies for wafer-scaled miniaturized gas sensors design and fabrication.
"Top-down" and "bottom-up" strategies for wafer-scaled miniaturized gas sensors design and fabrication.
复制标题
晶圆级微型气体传感器设计和制造的“自上而下”和“自下而上”策略
DOI：
10.1038/s41378-020-0144-4
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发表时间：
2020
影响因子：
7.9
通讯作者：
Qin S
中科院分区：
文献类型：
--
作者：
Liu L;Wang Y;Sun F;Dai Y;Wang S;Bai Y;Li L;Li T;Zhang T;Qin S
通过印刷和浆料涂覆等自上而下的技术制造大规模图案化纳米材料已被用于制造微型气体传感器。然而，在晶片规模的制造中，传感器的重复性和一致性仍然是一个挑战。在这项工作中，提出了一种“自上而下”和“自下而上”相结合的策略，通过在特定位置原位生长Ni(OH)2纳米球来制造高通量的晶片尺寸的小型化气体传感器。首先，采用微电子机械系统(MEMS)制造技术(“自上而下”策略)在2英寸(2“)硅片上制作了基于微热板的传感器芯片。然后利用模板引导的可控去湿方法组装了具有均匀微孔(微孔尺寸的相对标准偏差为3.5%，n>； 300)的多孔性热塑性弹性体薄膜，作为微孔区原位生长Ni(OH)2纳米球的图案化掩模(自下而上策略)。基于该策略得到的气体微传感器具有良好的电学性能重现性(RSD <； 0.8%，n= 8)和对实时硫化氢检测的传感响应(RSD <； 3.5%，n= 8)。
Manufacture of large-scale patterned nanomaterials via top-down techniques, such as printing and slurry coating, have been used for fabrication of miniaturized gas sensors. However, the reproducibility and uniformity of the sensors in wafer-scale fabrication are still a challenge. In this work, a “top-down” and “bottom-up” combined strategy was proposed to manufacture wafer-scaled miniaturized gas sensors with high-throughput by in-situ growth of Ni(OH)2nanowalls at specific locations. First, the micro-hotplate based sensor chips were fabricated on a two-inch (2”) silicon wafer by micro-electro-mechanical-system (MEMS) fabrication techniques (“top-down” strategy). Then a template-guided controllable de-wetting method was used to assemble a porous thermoplastic elastomer (TPE) thin film with uniform micro-sized holes (relative standard deviation (RSD) of the size of micro-holes <3.5 %,n> 300), which serves as the patterned mask for in-situ growing Ni(OH)2nanowalls at the micro-hole areas (“bottom-up” strategy). The obtained gas microsensors based on this strategy showed great reproducibility of electric properties (RSD < 0.8%,n= 8) and sensing response toward real-time H2S detection (RSD < 3.5%,n= 8).
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