Stability and degradation of plasma deposited boron nitride thin films in ambient atmosphere
Stability and degradation of plasma deposited boron nitride thin films in ambient atmosphere
复制标题
DOI：
10.1016/j.tsf.2009.06.043
复制
发表时间：
2009-11-02
期刊：
影响因子：
2.1
通讯作者：
Katircioglu, Bayram
中科院分区：
文献类型：
--
作者：
Anutgan, Tamila Aliyeva;Anutgan, Mustafa;Katircioglu, Bayram
采用低功率射频等离子体增强化学气相沉积法，在296 K、398 K、523 K和623 K温度下，以氮气（N2.和氢稀释的乙硼烷（15%B2H6在H-2中）源气体。利用傅里叶变换红外光谱和紫外-可见光谱研究了BN薄膜在大气环境中的稳定性和降解情况。水分对薄膜的作用随着衬底温度（Ts）的增加而减少，从而损害薄膜的生长速率。这被解释为在较高的T-s下含B-O的无序组织的孔隙率和相对体积分数的降低。不稳定膜的厚度随空气暴露时间的增加而增加。与此平行，虽然E-O 4能隙随时间增加，但Tauc能隙保持不变。亚林隙的增长和Tauc斜率随时间的减小表明结构有序度的降低。硼酸铵水合物的结晶，化学反应的主要产物，最初形成的散装。在稍后的时间，由于增加的孔隙率和无序，膜厚度减小，而微晶岛在膜表面上方快速生长。研究了其它沉积参数对BN膜稳定性的影响，发现1260/1360 cm（-1）（O-B-O/B-N）红外峰面积比对BN膜的稳定性有指示作用。(C)2009爱思唯尔有限公司版权所有。
Boron nitride (BN) thin films were deposited at 296 K, 398 K, 523 K and 623 K by low power radio frequency plasma enhanced chemical vapor deposition with nitrogen (N-2.) and hydrogen diluted diborane (15% B2H6 in H-2) source gases. Fourier transform infrared and UV-visible spectroscopies were used to investigate the stability and degradation of BN films under ambient air conditions. The action of moisture on the films is reduced with increasing substrate temperature (T-s) to the detriment of the film growth rate. This has been interpreted as related to the decrease in porosity and relative volume fraction of B-O containing disordered tissue at higher T-s The thickness of the unstable films increases logarithmically with the air exposure time. Parallel to this, although the E-o4 gap increases logarithmically with time, the Tauc gap remains the same. The increase of subgap absorptions and the decrease of Tauc slope with time indicate reduction of structural order. Crystallites of ammonium borate hydrates, the main product of the chemical reactions, are initially formed within the bulk. At a later time, as a result of increased porosity and disorder, the film thickness decreases while the islands of micro-crystallites rapidly grow above the surface of the film. Stability dependence on other deposition parameters was also studied: it is found that the 1260/1360 cm(-1) (O-B-O/B-N) infrared peak area ratio plays an indicator role to reveal the stability of BN films. (C) 2009 Elsevier B.V. All rights reserved.