Nonlocal kinetics of the electrons in a low-pressure afterglow plasma.
Nonlocal kinetics of the electrons in a low-pressure afterglow plasma.
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DOI：
10.1103/physreve.73.056402
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发表时间：
2006-05
期刊：
影响因子：
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通讯作者：
S. Gorchakov;D. Uhrlandt;Michael J. Hebert;U. Kortshagen
中科院分区：
文献类型：
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作者：
S. Gorchakov;D. Uhrlandt;Michael J. Hebert;U. Kortshagen
低压脉冲等离子体被广泛应用于各种技术应用中。了解放电余辉阶段的现象，可以优化操作条件，改进工艺参数。在低压下，等离子体的电子成分决定了放电的主要特征，因为它的行为支配着所有其他等离子体性质。本文采用非局域动力学方法，用自洽模型研究了感应耦合放电低气压余辉等离子体中的电子动力学。给出了该模型的主要特点。特别注意的是确定的放电的稳定状态，从该等离子体的衰变开始。重点描述了电子与气体的碰撞相互作用。在2-4帕的压力氩气的理论研究结果。计算的各向同性部分的电子速度分布函数，电子密度，平均电子能量，和壁电位的时间演化与实验数据进行了比较讨论。
Low-pressure pulsed plasmas are widely used in various technological applications. Understanding of the phenomena taking place in afterglow phase of the discharge makes possible the optimization of the operation conditions and improvement of the technical parameters. At low pressure the electron component of the plasma determines the main features of the discharge since its behavior dominates all other plasma properties. We study the electron kinetics in a low-pressure afterglow plasma of an inductively coupled discharge by means of a self-consistent model which uses the nonlocal kinetic approach. The main features of the model are given. Special attention is paid to determination of the steady state of the discharge from which the decay of the plasma begins. Emphasis is also put on the description of the collisional interaction between the electrons and gas. Results of theoretical investigations for argon at a pressure of 2-4 Pa are presented. Calculated temporal evolutions of the isotropic part of the electron velocity distribution function, electron density, mean electron energy, and wall potential are discussed in comparison with experimental data.