Infrared microthermography of microfabricated devices
Infrared microthermography of microfabricated devices
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DOI：
10.1063/1.2746573
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发表时间：
2007-06-01
影响因子：
1.6
通讯作者：
McGill, R. Andrew
中科院分区：
文献类型：
--
作者：
Furstenberg, Robert;Kendziora, C. A.;McGill, R. Andrew
本文报道了一种新的红外显微热成像实验装置，它适用于各种样品，包括透明样品和穿孔器件。这种设置特别适合于微加工器件的热成像。传统上，使用校准热板进行温度校准，但这不适用于透射样品。在这项工作中，一个定制设计的微型校准炉结合空间滤波被用来获得准确的静态和瞬态温度图的主动加热设备。该过程不需要事先知道发射率。对标定算法和图像处理算法进行了讨论和分析。我们表明，相对便宜的非制冷测辐射热计阵列可以是一个合适的探测器选择在某些辐射测量应用。作为一个例子，我们应用这种方法在分析的温度分布的主动加热的微型预浓缩器装置，采用了穿孔膜，并用于痕量检测非法物质。(c)2007年，美国物理学会。
We report a new experimental apparatus for infrared microthermography applicable to a wide class of samples including semitransparent ones and perforated devices. This setup is particularly well suited for the thermography of microfabricated devices. Traditionally, temperature calibration is performed using calibration hot plates, but this is not applicable to transmissive samples. In this work a custom designed miniature calibration oven in conjunction with spatial filtering is used to obtain accurate static and transient temperature maps of actively heated devices. The procedure does not require prior knowledge of the emissivity. Calibration and image processing algorithms are discussed and analyzed. We show that relatively inexpensive uncooled bolometer arrays can be a suitable detector choice in certain radiometric applications. As an example, we apply this method in the analysis of temperature profiles of an actively heated microfabricated preconcentrator device that incorporates a perforated membrane and is used in trace detection of illicit substances. (c) 2007 American Institute of Physics.