The effect of hydrogen on the network disorder in hydrogenated amorphous silicon
The effect of hydrogen on the network disorder in hydrogenated amorphous silicon
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DOI:
10.1063/1.125155
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发表时间:
1999-10
影响因子:
4
通讯作者:
Sanju Gupta;R. Katiyar;G. Morell;S. Z. Weisz;I. Balberg
中科院分区:
文献类型:
--
作者:
Sanju Gupta;R. Katiyar;G. Morell;S. Z. Weisz;I. Balberg
Previous Raman scattering studies of the effect of hydrogen on the atomic network disorder in various hydrogenated amorphous silicon (a-Si:H) materials resulted in contradicting conclusions. We resolve these contradictions by showing that the surface and the bulk of a-Si:H films can behave differently due to their different hydrogen contents. In particular, we establish that hydrogen has a relatively moderate effect in improving the short-range order but a profound effect in improving the intermediate-range order of the atomic network.