Verification of LRRM Calibrations with Load Inductance Compensation for CPW Measurements on GaAs Substrates
Verification of LRRM Calibrations with Load Inductance Compensation for CPW Measurements on GaAs Substrates
复制标题
使用负载电感补偿验证 GaAs 基板上 CPW 测量的 LRRM 校准
DOI：
10.1109/arftg.1993.327040
复制
发表时间：
1993
期刊：
影响因子：
--
通讯作者：
J. Pence
中科院分区：
文献类型：
--
作者：
J. Pence
微波晶圆测量界一直在寻找一种机制来量化校准不准确性。美国国家标准与技术研究所（NIST）最近的工作，使校准误差范围的确定与一个很好理解的技术-NIST多线GaAs TRL校准。一系列的自动线反射反射匹配（LRRM）校准与负载电感补偿进行商用氧化铝共面波导标准。然后将这些校准与NIST校准进行比较。确定并比较计算的误差范围，以评估自动校准的相对准确度和重复性。
The microwave on-wafer measurement community has been searching for a mechanism to quantify calibration inaccuracies. Recent work at the National Institute of Standards and Technology (NIST) has enabled the determination of calibration error bounds by comparison with a well understood technique - the NIST multi-line GaAs TRL calibration. A series of automated Line-Reflect-Reflect-Match (LRRM) calibrations with load inductance compensation were performed on commercially available alumina coplanar waveguide standards. These calibrations were then compared with an NIST calibration. The calculated error bounds were determined and compared in order to assess both the relative accuracy and the repeatability of the automated calibrations.