AN ORIGIN OF RF BREAKDOWN IN VACUUM
AN ORIGIN OF RF BREAKDOWN IN VACUUM
复制标题
DOI：
--
复制
发表时间：
1997
期刊：
影响因子：
--
通讯作者：
M. Karetnikov
中科院分区：
文献类型：
--
作者：
M. Karetnikov
本文在阳极模型的框架下研究了射频真空击穿引发。该模型建立在场发射电子轰击电极附近气体电离的基础上。电子诱导气体解吸并引起初级电离。二次离子和快离子在射频击穿中起主要作用。在射频电场的加速作用下，它们产生解吸气体的累积电离。计算了击穿电场随频率和电子束参数的变化。预击穿电子束电流与实验数据在数量级上是一致的。该模型符合射频击穿的基本特性。给出了频率与不发生击穿的低场边界之间的关系。累积电离：电击穿;场致电子发射;射频放电;真空
A study of RF vacuum breakdown inltiation in the framework of anodic model is considered. The model is founded on gas ionization in the vicinity of electrode bombarded by field-emitted electrons. The electrons induce gas desorption and gve rise io primary ionization. The secondary ions and fast immals play the major role in RF breakdown initiatiou. Being accelerated by RF electric field, they produce cumulative ionization of desorbed gas. The breakdown electric field as a function of frequency and electron beam parameters is calculated. The pre-breakdown electron beam current is consistent by the order of magnitude with the experimental data. ’The model is in agreement with basic characteristics of RF breakdown. A reiation between the frequency and lower field boundary below which the breakdown does not occur is presenled. Keyvords: Cumulative ionization: Electric breakdown; Field-electron emission; RF discharge; Vacuum