Characteristics of electrohydrodynamically prepared titanium dioxide films

Characteristics of electrohydrodynamically prepared titanium dioxide films
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电流体动力学制备的二氧化钛薄膜的特性

DOI:
10.1007/s00339-007-4232-1
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发表时间:
2007
期刊:
影响因子:
--
通讯作者:
Mohan Edirisinghe
Mohan Edirisinghe
中科院分区:
--
文献类型:
--
作者:
S. Mahalingam;Mohan Edirisinghe

文献摘要

被引文献

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在4.5 kV的电场作用下,二氧化钛前驱体溶胶以10 ~ 10m3 -1的流速流过针管,生成了粒径为0.3 ~ 6 μm的液滴。液滴被收集在硅衬底上,形成均匀厚而致密的薄膜。利用拉曼光谱、x射线衍射、场发射扫描电镜和紫外/可见光谱对沉积膜和退火膜进行了表征。拉曼光谱显示退火后的薄膜为锐钛矿相,退火后为金红石相。经过500℃退火后,二氧化钛薄膜的能带能为3.50 eV,直接能带能为3.95 eV。
A titanium dioxide precursor sol flowing through a needle at a flow rate of 10-10m3s-1was subjected to an electric field of 4.5 kV to generate droplets in the size range 0.3–6 μm. The droplets were collected on a silicon substrate to form uniformly thick, dense films. Raman spectroscopy, X-ray diffraction, field emission scanning electron microscopy and UV/Vis spectroscopy were used to characterize as-deposited and annealed films. Raman spectra show the annealed films were anatase phase with annealing converting it to the rutile phase. The energy bandgap of the titanium dioxide film annealed to 500 °C shows an indirect bandgap energy of 3.50 eV and a direct bandgap energy of 3.95 eV.