Diamondlike carbon film deposition on a polycarbonate-tube inner wall using a cylindrical electrode with radio frequency glow discharge plasma
Diamondlike carbon film deposition on a polycarbonate-tube inner wall using a cylindrical electrode with radio frequency glow discharge plasma
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DOI：
10.1063/1.1832751
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发表时间：
2005-01
影响因子：
3.2
通讯作者：
Y. Ohgoe;K. Hirakuri
中科院分区：
文献类型：
--
作者：
Y. Ohgoe;K. Hirakuri
射频（rf）等离子体化学气相沉积（CVD）工艺是非常有用的薄膜沉积工艺。然而，使用平面电极的普通rf等离子体CVD技术使得其难以应用于三维绝缘体结构。本文采用圆柱电极等离子体沉积技术，在直径11 mm，长100 mm的聚碳酸酯管内壁上沉积了存款类金刚石薄膜。该工艺可适用于圆柱形基材，例如聚合物管。在研究这种工艺的可行性时，在氦气压力（50，100和150 Pa）下，用双探针法测量了30 W射频功率下的等离子体状态。氦等离子体在聚碳酸酯管内产生明亮的稳定的空心阴极放电。因此，圆柱形电极工艺有望应用于圆柱形材料，如聚合物管。在实际沉积DLC膜时（CH4气体10Pa，射频功率30W，沉积时间10min），...
Radio frequency (rf) plasma chemical vapor deposition (CVD) process is very useful for film deposition. However, common rf plasma CVD techniques using planar electrodes make it difficult to apply to three-dimensional insulator structures. In this study, to deposit diamondlike carbon (DLC) films on a polycarbonate-tube inner wall (ϕ 11mm, length 100mm), we have developed the cylindrical electrode plasma process. This process could be adapted to cylindrical substrates such as polymeric tubes. In investigating the availability of this process, under helium (He) gas pressures (50, 100, and 150Pa), the plasma states of the rf power at 30W were measured using a double-probe method. The He plasma was generated bright as a stable, hollow cathode discharge inside the polycarbonate tube. As a result, the cylindrical electrode process was expected to have applications for cylindrical materials such as polymeric tubes. In actual deposition of DLC film (CH4 gas at 10Pa, rf power at 30W, and deposition time at 10min), ...