High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit
High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit
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DOI：
10.1063/1.2905260
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发表时间：
2008-03-31
影响因子：
4
通讯作者：
Fedeli, J. -M.
中科院分区：
文献类型：
--
作者：
Roelkens, G.;Vermeulen, D.;Fedeli, J. -M.
提出了一种用于连接单模光纤和在绝缘体上制作的纳米光子集成电路的高效衍射栅结构。通过在光栅定义之前添加硅覆盖层，衍射栅结构被设计成固有地具有非常强的方向性。用标准互补金属氧化物半导体工艺制作的器件，在1.53微米波长下的耦合效率实验表明，耦合效率为55%。通过对光栅参数的优化，从理论上证明了均匀的光栅结构可以获得80%的耦合效率。(C)2008年美国物理研究所。
High efficiency diffractive grating structures to interface a single mode optical fiber and a nanophotonic integrated circuit fabricated on silicon-on-insulator are presented. The diffractive grating structures are designed to be inherently very directional by adding a silicon overlay before grating definition. 55% coupling efficiency at a wavelength of 1.53 mu m is experimentally demonstrated on devices fabricated using standard complementary metal-oxide semiconductor technology. By optimizing the grating parameters, we theoretically show that 80% grating coupling efficiency can be obtained for a uniform grating structure. (C) 2008 American Institute of Physics.