Micro-manufacturing: research, technology outcomes and development issues
Micro-manufacturing: research, technology outcomes and development issues
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DOI：
10.1007/s00170-009-2411-2
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发表时间：
2010-04-01
影响因子：
3.4
通讯作者：
Loziak, D.
中科院分区：
文献类型：
--
作者：
Qin, Yi;Brockett, A.;Loziak, D.
除了继续努力开发基于MEMS的制造技术外，微制造的最新努力也是在非基于MEMS的制造中。由于对微型部件的需求增加，以及在缩小传统的宏观制造工艺到微长度规模制造方面有希望取得发展，这一领域的研究和技术发展受到鼓舞。本文重点介绍了欧盟资助的一些微/纳米制造研究活动，并举例说明了微制造方法/技术、工艺链、混合工艺、制造设备和支持技术/设备等方面的最新进展，随后概述了欧盟MASMICRO项目的成就。最后，给出了结论性意见，提出了几个问题，进一步发展微型制造。
Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in micro-manufacturing is also in non-MEMS-based manufacturing. Research and technological development in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. Finally, concluding remarks are given, which raise several issues concerning further development in micro-manufacturing.