Micro-electro-discharge machining as microsensor fabrication technology
Micro-electro-discharge machining as microsensor fabrication technology
复制标题
DOI：
10.1109/jsen.2003.818459
复制
发表时间：
2003-10
影响因子：
4.3
通讯作者：
W. Meeusen;J. Clijnen;D. Reynaerts;H. Brussel;R. Puers
中科院分区：
文献类型：
--
作者：
W. Meeusen;J. Clijnen;D. Reynaerts;H. Brussel;R. Puers
本文介绍了三个小型化的机械传感器的设计和制造，以展示三维加工能力的微电火花加工（EDM）。第一传感器是惯性双轴倾斜传感器。惯性质量的位移是通过二维位置敏感器件（PSD）光学测量的。微细电火花加工的加工自由度使得在一个整体结构中生产传感器和外壳成为可能。第二个传感器是一个惯性单轴倾角传感器，这表明与传统的电火花微细加工技术的微细电火花加工技术的兼容性。该传感器的机械结构采用微细电火花加工，电容敏感部分采用光刻工艺制作。集成的目的是建立一种混合技术，继承了微细电火花和光刻的优点。第三种小型化传感器是三分量力传感器。力传感器的机械结构将力转换为位移，并通过光学方式进行测量。该力传感器的机械结构是由线切割和微细电火花加工。
This paper presents the design and fabrication of three miniaturized mechanical sensors to demonstrate the three-dimensional machining capabilities of micro-electro-discharge machining (EDM). The first sensor is an inertial bi-axial inclination sensor. The displacement of an inertial mass is measured optically by means of a two-dimensional position sensitive device (PSD). The machining freedom of micro-EDM makes it possible to produce both sensor and housing in one monolithic structure. The second sensor is an inertial uni-axial inclination sensor, which demonstrates the compatibility of the micro-EDM technology with the conventional photolithographic micromachining technologies. The mechanical structure of the sensor is machined by micro-EDM and the capacitive sensing part is produced by lithography. The aim of the integration is to set up a hybrid technology, which inherits the benefits of both micro-EDM and photolithography. The third miniaturized sensor is a three-component force sensor. The mechanical structure of the force sensor converts forces into displacements, which are measured optically. The mechanical structure of the force sensor is produced by wire-EDM and micro-EDM.