Portable profilometer based on low-coherence interferometry and smart pixel camera
Portable profilometer based on low-coherence interferometry and smart pixel camera
复制标题
基于低相干干涉测量和智能像素相机的便携式轮廓仪
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
A. Styk
中科院分区：
文献类型：
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作者：
L. Sałbut;A. Pakuła;S. Tomczewski;A. Styk
虽然商业上有低相干涉仪(例如，白光干涉仪)，但它们通常相当笨重、昂贵，并且提供的灵活性有限。本文介绍了一种新型的基于低相干法的便携式轮廓仪。装置中采用了光谱形状可控的白光二极管，以提高零级条纹对比度，从而实现更好、更快的定位。在图像分析方面，采用了与参考镜换能器同步的特殊类型的CMOS矩阵(称为智能像素相机)。由于条纹对比度分析的硬件实现，在每个像素上独立进行测量，大大减少了测量时间。高速处理加上紧凑的设计，使轮廓仪可以用作便携式设备，用于室内和室外测量。通过几个应用实例说明了所设计的轮廓仪的性能。
Although low coherence interferometers are commercially available (e.g., white light interferometers), they are generally quite bulky, expensive, and offer limited flexibility. In the paper the new portable profilometer based on low coherence interferometry is presented. In the device the white light diode with controlled spectrum shape is used in order to increase the zero order fringe contrast, what allows for its better and quicker localization. For image analysis the special type of CMOS matrix (called smart pixel camera), synchronized with reference mirror transducer, is applied. Due to hardware realization of the fringe contrast analysis, independently in each pixel, the time of measurement decreases significantly. High speed processing together with compact design allows that profilometer to be used as the portable device for both in and out door measurements. The capabilities of the designed profilometer are well illustrated by a few application examples.