Material potential and scalability challenges of germanium CMOS
Material potential and scalability challenges of germanium CMOS
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DOI:
10.1109/iedm.2011.6131631
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发表时间:
2011-12
期刊:
影响因子:
--
通讯作者:
A. Toriumi;C. H. Lee;S. K. Wang;T. Tabata;M. Yoshida;D. Zhao;T. Nishimura;K. Kita;K. Nagashio
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文献类型:
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作者:
A. Toriumi;C. H. Lee;S. K. Wang;T. Tabata;M. Yoshida;D. Zhao;T. Nishimura;K. Kita;K. Nagashio
This paper overviews the present status of Ge MOSFET technology, particularly focusing on n-FETs in terms of materials science of GeO2/Ge gate stacks and device physics of inversion layer mobility, and then discusses future prospects and fundamental challenges for further miniaturization from the viewpoint of Ge/high-k gate stacks and ET-GeOI MOSFETs.