High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology
High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology
复制标题
高分辨率聚焦离子束：FIB 及其应用：液态金属离子源和离子光学的物理学及其在聚焦离子束技术中的应用
DOI：
10.1007/978-1-4615-0765-9
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发表时间：
2002
影响因子：
4
通讯作者：
L. Swanson
中科院分区：
文献类型：
--
作者：
J. Orloff;M. Utlaut;L. Swanson
序言。关于作者。导论. 1.场电离源。2.液态金属离子源物理学。3.用于LMIS的离子光学器件。4.离子与固体的相互作用5.实用聚焦离子束光学与系统。6.聚焦离子束的应用。附录1.场解吸附和电离理论的基础。附录2.溅射产率表。指数.
Preface. About the Authors. Introduction. 1. Field Ionization Sources. 2. Physics of Liquid Metal Ion Sources. 3. Ion Optics for LMIS. 4. Interactions of Ions with Solids. 5. Practical Focused Ion Beam Optics and Systems. 6. Applications of Focused Ion Beams. Appendix 1. Elements of the Theory of Field Desorption and Ionization. Appendix 2. Table of Sputter Yields. Index.