Aluminium nitride by plasma spraying of an Al2O3–C–Sm2O3 system
Aluminium nitride by plasma spraying of an Al2O3–C–Sm2O3 system
复制标题
Al2O3–C–Sm2O3 系统等离子喷涂氮化铝
DOI：
10.1016/s0921-5093(00)01658-0
复制
发表时间：
2001
期刊：
影响因子：
6.4
通讯作者：
L. Cao
中科院分区：
文献类型：
--
作者：
K. Khor;F. Boey;X. Zhao;L. Cao
由于AlN具有高导热性、低介电常数和与硅的热膨胀系数（CTE）相容性，因此对高性能陶瓷介电衬底材料的需求不断增加，导致使用AlN。本文报道了一种热等离子体喷涂工艺，该工艺提高了al2o3 - C - sm2o3体系的反应性，使其在1400℃下加热足以完全转化为粒径约为2.45 μm的六方AlN球形颗粒。反应性的提高主要是由于等离子喷涂形成了完整的复合粉末，减少了氮化反应所需的总吸热，以及在此过程中smalo3的液相烧结作用。
Increasing demand for high performance ceramic dielectric substrate materials has led to the use of AlN due to its high thermal conductivity, low dielectric constant and co-efficient of thermal expansion (CTE) compatibility with that of silicon. This paper reports on a thermal plasma spraying process which enhanced the reactivity of an Al2O3–C–Sm2O3system so that subsequent heating at 1400°C was sufficient to fully convert it to hexagonal AlN spherical particles with a particle size of about 2.45 μm. It was thought that the increase in reactivity was due both to the formation of the integrated composite powder by plasma spraying, which reduced the overall endothermic heat required for the nitridation reaction, and the liquid phase sintering effect of SmAlO3during the process.