Development of a multi-level repulsive force out-of-plane micro electrostatic actuator
Development of a multi-level repulsive force out-of-plane micro electrostatic actuator
复制标题
多级斥力面外微型静电执行器的研制
DOI：
10.1109/iecon.2009.5415321
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
R. Ben Mrad
中科院分区：
文献类型：
--
作者：
S. He;R. Ben Mrad
提出了一种多级排斥力面外微型静电致动器。该致动器使用排斥力而不是吸引力，避免了与传统平行板微型静电致动器相关的“拉入”效应。在相同电压下，多级执行机构的行程是单级2层执行机构的两倍。可以开发出这样的致动器，从而产生远离基板的大行程。
A multi-level repulsive force out-of-plane micro electrostatic actuator is presented. The actuator uses a repulsive force instead of an attractive force and avoids the “pull-in” effect associated with conventional parallel-plate micro electrostatic actuators. The multi-level actuator stroke is twice as large as that of a single-level 2-layer actuator when subject to the same voltage. Such actuators can be developed leading to a large stroke away from the substrate.