Analysis of data from various indentation techniques for thin films intrinsic hardness modelling
Analysis of data from various indentation techniques for thin films intrinsic hardness modelling
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DOI：
10.1016/j.tsf.2007.10.003
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发表时间：
2008-02-29
期刊：
影响因子：
2.1
通讯作者：
Lesage, J.
中科院分区：
文献类型：
--
作者：
Chicot, D.;Bemporad, E.;Lesage, J.
由于基底的影响，通过标准的微压痕测试直接测量薄膜的硬度并不总是可能的。在这种情况下，本征膜硬度的测定需要分析一组实验表观硬度值获得不同的压痕载荷。文献中提出了许多基于各种假设的数学方程，其中大多数模型是基于标准维氏压痕建立的。使用这些模型来处理由努普压痕获得的数据不提供相同的固有硬度值，即使在努普/维氏标准转换后，比从维氏压痕获得的一个。当处理来自深度传感压痕的数据时，也会出现同样的问题。在本工作中提出了一种方法，以获得可比的硬度值，通过考虑一个“等效”的维氏硬度的情况下的努氏压痕和相应的马顿氏硬度的深度传感压痕。该方法已用于测定氮化钛薄膜的本征硬度。(C)2007 Ftsevier B. V.保留所有权利。
Due to the influence of the substrate, direct measurement of the hardness of thin films by standard micro-indentation tests is not always possible. In such situation, determination of the intrinsic film hardness requires the analysis of a set of experimental apparent hardness values obtained for different indentation loads. A number of mathematical equations based on various assumptions were proposed in literature for that purpose.Most of the models were established on the basis of standard Vickers indentation. Using these models to process the data obtained by Knoop indentation does not provide the same intrinsic hardness value, even after Knoop/Vickers standard conversion, than the one obtained from Vickers indentation. The same problem arises when processing the data coming from depth-sensing indentation. A method to obtain comparable hardness values is proposed in the present work by considering an "equivalent" Vickers hardness in the case of Knoop indentations and the corresponding Martens hardness for depth-sensing indentation. This method has been used to determine the intrinsic hardness of titanium nitride film. (C) 2007 Ftsevier B.V. All rights reserved.