High Speed Regeneration of BO-Defects : Improving Long-Term Solar Cell Performance within Seconds
High Speed Regeneration of BO-Defects : Improving Long-Term Solar Cell Performance within Seconds
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DOI：
10.4229/eupvsec20142014-2bp.1.2
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发表时间：
2014-11
期刊：
影响因子：
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通讯作者：
Svenja Wilking;J. Engelhardt;S. Ebert;C. Beckh;A. Herguth;G. Hahn
中科院分区：
文献类型：
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作者：
Svenja Wilking;J. Engelhardt;S. Ebert;C. Beckh;A. Herguth;G. Hahn
硼-氧相关缺陷通常限制由含有高浓度硼以及氧的硅制成的太阳能电池的效率。这些缺陷的有害影响可以通过应用需要在略微升高的温度下注入载流子的再生程序来消除。该过程的动力学受不同处理步骤如热处理的影响，并且发现依赖于硅块体中足够高的氢浓度。它示出在这里，无论是发射极的形成，也不使用Al 2 O3/SiNx：H或SiO2/SiNx：H钝化堆栈影响再生的根本方式。相比之下，在高温烧制步骤期间充当氢源的SiNx：H层的厚度对再生具有直接影响，证实了更好的氢化导致更快的再生反应。浓缩所有加速再生的不同工艺步骤允许应用由相对高温和高载流子注入的组合组成的高速再生工艺，从而在不到10 s的时间内完全再生BO缺陷。这使得再生作为太阳能电池生产中的在线工艺变得可行，从而解决了硼氧缺陷的问题。通过激光诱导再生实现更进一步的加速，其中衬底同时被加热和照射。
Boron-oxygen related defects typically limit the efficiency of solar cells made from silicon containing high concentrations of boron as well as oxygen. The detrimental effect of these defects can be eliminated by applying a Regeneration procedure that needs carrier injection at slightly elevated temperatures. The kinetics of this process is influenced by different processing steps like thermal treatment and was found to rely on a high enough hydrogen concentration in the silicon bulk. It is shown here that neither emitter formation nor the use of Al2O3/SiNx:H or SiO2/SiNx:H passivation stacks affect Regeneration in a fundamental way. By contrast, the thickness of a SiNx:H layer acting as hydrogen source during a high temperature firing step has direct influence on Regeneration confirming that better hydrogenation results in faster Regeneration reactions. Condensing different process steps that all accelerate Regeneration allows the application of a high-speed Regeneration process consisting of a combination of relatively high temperature and high carrier injection, resulting in complete Regeneration of BO defects in less than 10 s. This makes Regeneration feasible as an in-line process in solar cell production and thus solves the problem of the boron-oxygen defects. Even further acceleration is achieved by laser induced Regeneration where the substrate is heated and illuminated simultaneously.