Threading dislocation reduction in strained layers
Threading dislocation reduction in strained layers
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DOI：
10.1063/1.369467
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发表时间：
1999
影响因子：
3.2
通讯作者：
A. Romanov;W. Pompe;S. Mathis;G. Beltz;J. Speck
中科院分区：
文献类型：
--
作者：
A. Romanov;W. Pompe;S. Mathis;G. Beltz;J. Speck
在这篇文章中，我们已经开发出的模型，由于引入了有意应变层的螺纹位错（TD）减少。在这个模型中考虑了三种不同类型的位错：错配位错（MD）、移动的TD和其滑移运动被穿过TD滑移路径的MD阻挡的TD（非移动的TD）。该模型是基于横向TD运动过程中MD的形成。应变引起的TD运动导致移动的TD与其他移动的TD或被阻挡的TD的可能的湮灭反应，或者其中移动的TD通过与MD的阻挡反应被转换为非移动的TD的反应。移动的和阻塞的TD的密度和MD密度的演化由三个耦合的非线性一阶微分方程表示。当不考虑MD对TD的阻塞时，方程有一个解析解，表明最终TD密度应呈指数下降，其中指数的自变量与TD的密度成正比。
In this article, we have developed models for threading dislocation (TD) reduction due to the introduction of an intentionally strained layer. Three different types of dislocations have been considered in this model: misfit dislocations (MDs), mobile TDs, and TDs whose glide motion has been blocked by a MD crossing the glide path of the TD (immobile TDs). The models are based on MD formation by the process of lateral TD motion. The strain-induced TD motion leads to possible annihilation reactions of mobile TDs with either other mobile TDs or blocked TDs, or reactions in which a mobile TD is converted to an immobile TD by a blocking reaction with a MD. The evolution of the density of mobile and blocked TDs and the MD density is represented by three coupled nonlinear first order differential equations. When blocking of TDs by MDs is not considered, the equations have an analytical solution that shows that the final TD density should decrease exponentially where the argument of the exponent is proportional t...