Nitrogen dissociation degree in the diffusion region of a helicon plasma source obtained by atomic lines to molecular band intensities ratio
Nitrogen dissociation degree in the diffusion region of a helicon plasma source obtained by atomic lines to molecular band intensities ratio
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通过原子线与分子带强度比获得的螺旋等离子体源扩散区的氮解离度
DOI：
10.1063/1.2777998
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发表时间：
2007
影响因子：
3.2
通讯作者：
Xuan Sun
中科院分区：
文献类型：
--
作者：
C. Biloiu;E. Scime;I. Biloiu;Xuan Sun
提出了基于光学发射光谱和朗缪尔探针测量的氮螺旋等离子体源扩散区的解离度估计。估计过程依赖于原子三重态3pS04→3sP4（742.36, 744.23和746.83nm）的强度与第一个正体系（AΣu+3→BΠg3）在750.39nm处的4-2波段强度之比的测量和BΠg3态的相对振动分布的测量。由Langmuir探针特性的二阶导数得到的电子能量分布函数和已公布的激发截面用于计算电子冲击激发速率系数，然后将其与原子线和分子带强度进行比较，以计算解离程度。在电容耦合和电感耦合两种不同的工作模式下，在产生的10mTorr， 500W， 10.74MHz螺旋的膨胀区中获得了5%和13%的解离分数。
Estimates of the dissociation degree in the diffusion region of a nitrogen helicon plasma source based on optical emission spectroscopy and Langmuir probe measurements are presented. The estimation procedure relies on measurements of the ratios of the intensities of the atomic triplet 3pS04→3sP4 (742.36, 744.23, and 746.83nm) to the intensity of the 4-2 band of the first positive system (AΣu+3→BΠg3) at 750.39nm and the measured relative vibrational distribution of the BΠg3 state. The electron energy distribution function, obtained from the second derivative of the Langmuir probe characteristic, and published excitation cross sections are used to calculate the electron-impact excitation rate coefficients—which are then compared to the atomic line and molecular band intensities to calculate the dissociation degree. For two distinct operating regimes, capacitively and inductively coupled, dissociation fractions of 5% and 13% are obtained in the expansion region of a 10mTorr, 500W, 10.74MHz helicon generated ...