CONTROLLED FOLDING OF MICROMETER-SIZE STRUCTURES
CONTROLLED FOLDING OF MICROMETER-SIZE STRUCTURES
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DOI：
10.1126/science.268.5218.1735
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发表时间：
1995-06-23
期刊：
影响因子：
56.9
通讯作者：
LUNDSTROM, I
中科院分区：
文献类型：
--
作者：
SMELA, E;INGANAS, O;LUNDSTROM, I
已经制造了几种类型的微致动器，从简单的桨到自组装和自拆卸立方体。由一层聚合物和一层金制成的导电双层被用作铰链，将刚性板彼此连接并连接到硅衬底。铰链的弯曲是电控的并且可逆的，允许板的精确三维定位。该结构从基板上释放的技术的基础上差分粘附。这种方法避免了牺牲层的使用，并允许致动器将自己从表面上拉下来，可以在微机械加工中具有普遍的应用。可能包括制造其光反射或化学性质可以切换的表面。
Several types of microactuators have been fabricated, from simple paddles to self-assembling and -disassembling cubes. Conducting bilayers made of a layer of polymer and a layer of gold were used as hinges to connect rigid plates to each other and to a silicon substrate. The bending of the hinges was electrically controlled and reversible, allowing precise three-dimensional positioning of the plates. The structures were released from the substrate with a technique based on differential adhesion. This method, which avoids the use of a sacrificial layer and allows the actuators to pull themselves off the surface, may have general applications in micromachining. Possibilities include the manufacture of surfaces whose light reflection or chemical properties can be switched.