Optical analysis of complex multilayer structures using multiple data types
Optical analysis of complex multilayer structures using multiple data types
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使用多种数据类型对复杂多层结构进行光学分析
DOI：
10.1117/12.192054
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
J. Woollam
中科院分区：
文献类型：
--
作者：
B. Johs;R. French;F. Kalk;W. McGahan;J. Woollam
可变入射角椭圆偏振光谱(VASE)通常用于多层膜的光学分析，但在某些情况下，该实验(在反射中进行)不能提供足够的信息来唯一地确定给定多层膜中的膜的厚度和光学常数。我们发现，用来自其他光学实验的数据来增加花瓶数据大大增加了多层膜所能获得的信息量，特别是当它们被沉积在透明衬底上时。在这项工作中，我们描述了一种形式，它允许我们通过组合使用反射和透射式椭偏测量法、翻转样品的反射式椭偏测量法和强度透射式测量来定量表征复杂的多层结构。为了证明这种能力的有效性，分析了一种复杂的梯度吸收薄膜结构(铬基相移光掩模毛坯)。
Variable angle of incidence spectroscopic ellipsometry (VASE) is commonly used for multilayer optical analysis, but in some cases this experiment (performed in reflection) does not provide sufficient information for the unique determination of the thicknesses and optical constants of the films in the given multilayer. We have found that augmenting the VASE data with data from other optical experiments greatly increases the amount of information which can be obtained for multilayers, particularly when they are deposited on transparent substrates. In this work, we describe a formalism which allows us to quantitatively characterize complex multilayer structures by using combined reflection and transmission ellipsometry, reflection ellipsometry with the sample flipped over, and intensity transmission measurements. To demonstrate the usefulness of this capability, the analysis of a complex graded, absorbing thin film structure (a Cr-based phase-shifting photomask blank), is presented.