Modulation of the LaFeO3 film growth by the terrace width of SrTiO3 substrates

Modulation of the LaFeO3 film growth by the terrace width of SrTiO3 substrates
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DOI:
10.1116/6.0002579
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发表时间:
2023-05
期刊:
Journal of Vacuum Science & Technology A
影响因子:
--
通讯作者:
Zeguo Lin;Xiaofeng Xu;Xiaoran Liu;Jiandong Guo;Fang Yang
Zeguo Lin;Xiaofeng Xu;Xiaoran Liu;Jiandong Guo;Fang Yang
中科院分区:
其他
文献类型:
--
作者:
Zeguo Lin;Xiaofeng Xu;Xiaoran Liu;Jiandong Guo;Fang Yang

文献摘要

相似文献

本文研究了用脉冲激光沉积法在不同台阶宽度的SrTiO_3(001)衬底上生长极性LaFeO_3薄膜。研究发现,由于极性补偿,LaFeO3薄膜的生长经历了从二维(2D)模式到三维(3D)模式的转变。然而,值得注意的是,从2D到3D的生长模式转变的临界厚度可以通过衬底的平台宽度来调节,即,当薄膜厚度为30个单层时,在窄台阶宽度(≤ 100 nm)的衬底上薄膜为3D生长,而在宽台阶宽度(≤ 400 nm)的衬底上薄膜为2D生长。结合动力学和动力学模型,我们发现,从二维到三维的临界厚度的调制是合理的动力学过程和动力学过程之间的竞争的结果。这些发现突出了衬底表面形貌对复杂氧化物薄膜外延生长的关键影响,揭示了具有极性堆叠的多功能人工低维结构的构建。
We have investigated the growth of polar LaFeO3 thin films on SrTiO3 (001) substrates with various terrace widths by pulsed laser deposition. It is found that the growth of LaFeO3 films undergoes a transition from a two-dimensional (2D) mode to a three-dimensional (3D) mode due to polarity compensation. Notably, however, the critical thickness of the growth mode transition from 2D to 3D can be modulated by the terrace width of the substrate, i.e., when the film is 30 monolayers thick, it becomes 3D growth on the substrates with narrow terrace width (∼100 nm) while it maintains 2D growth on those with wide terrace width (∼400 nm). Combined with dynamic and kinetic models, we have found that the modulation of the critical thickness from 2D to 3D is rationalized as a result of competition between the dynamic process and the kinetic process. These findings highlight the key influence of substrate surface morphology on the epitaxial growth of complex oxide films, shedding light on the construction of multifunctional artificial low-dimensional structures with polar stackings.