MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters
MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters
复制标题
DOI：
10.1088/0960-1317/26/10/104001
复制
发表时间：
2016-08
影响因子：
2.3
通讯作者：
C. Nordquist;D. Branch;T. Pluym;Sukwon Choi;J. Nguyen;A. Grine;C. Dyck;S. Scott;Molly N. Sing;R. Olsson
中科院分区：
文献类型：
--
作者：
C. Nordquist;D. Branch;T. Pluym;Sukwon Choi;J. Nguyen;A. Grine;C. Dyck;S. Scott;Molly N. Sing;R. Olsson
氮化铝轮廓模谐振器中换能器耦合的开关为多功能射频系统的未来可调谐和可重构滤波器提供了一种使能技术。利用微机电电容开关实现换能器电极指，调制金属电极指与压电材料之间的耦合，改变器件的响应。开/关开关宽度扩展谐振器，在谐振器中心频率为635 MHz时，开关比面积为24 dB。其他器件示例包括具有可切换阻抗的63 MHz谐振器和具有127 kHz精细中心频率调谐的470 MHz谐振器，通过MEMS开关对谐振器进行质量加载来完成。
Switching of transducer coupling in aluminum nitride contour-mode resonators provides an enabling technology for future tunable and reconfigurable filters for multi-function RF systems. By using microelectromechanical capacitive switches to realize the transducer electrode fingers, coupling between the metal electrode finger and the piezoelectric material is modulated to change the response of the device. On/off switched width extensional resonators with an area of 24 dB switching ratio at a resonator center frequency of 635 MHz. Other device examples include a 63 MHz resonator with switchable impedance and a 470 MHz resonator with 127 kHz of fine center frequency tuning accomplished by mass loading of the resonator with the MEMS switches.