Molecular dynamics simulation study of the growth of a rough amorphous carbon film by the grazing incidence of energetic carbon atoms
Molecular dynamics simulation study of the growth of a rough amorphous carbon film by the grazing incidence of energetic carbon atoms
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DOI：
10.1016/j.carbon.2011.08.053
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发表时间：
2012-02
期刊：
影响因子：
10.9
通讯作者：
M. Joe;M. Moon;J. Oh;Kyu Hwan Lee;Kwang-Ryeol Lee
中科院分区：
文献类型：
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作者：
M. Joe;M. Moon;J. Oh;Kyu Hwan Lee;Kwang-Ryeol Lee
采用分子动力学模拟方法研究了75eV的含能碳原子在不同入射角下沉积的非晶碳膜的形貌演化。碳原子的垂直或近垂直入射导致沉积膜的光滑表面。与此相反，一个凹凸状的表面结构出现，并导致粗糙的表面在掠入射，与实验一致。分叉的生长模式被解释为碰撞诱导的原子在生长表面上的输运。垂直入射时，原子在倾斜表面上的下坡输运占主导地位，这抑制了表面不规则性的演变，形成粗糙表面。然而，在掠入射的上坡传输的优势，使表面的不规则性生长的种子结构，这提供了阴影效应在碳沉积。这种机制介导初始种子形成和随后的粗糙化与阴影效应下的掠入射。
The morphological evolution of an amorphous carbon film deposited by energetic carbon atoms of 75eV with various angles of incidence was investigated by molecular dynamics simulation. Normal or near-normal incidence of carbon atoms resulted in a smooth surface of the deposited film. In contrast, a bump-like surface structure emerged and led to rough surfaces at grazing incidences, in agreement with the experiments. The bifurcated growth mode was explained by the impact-induced transport of atoms on the growing surface. The downhill transport of atoms on a sloping surface dominates at normal incidence, which suppresses the evolution of surface irregularities to form a rough surface. However, the dominance of uphill transport at a grazing incidence made the surface irregularities grow to a seed structure, which provided the shadowing effect during carbon deposition. This mechanism mediates initial seed formation and subsequent roughening together with shadowing effects under grazing incidence.