Multilayer Pb(Zr,Ti)O3 Thin Films for Ultrasonic Transducer
Multilayer Pb(Zr,Ti)O3 Thin Films for Ultrasonic Transducer
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用于超声波换能器的多层 Pb(Zr,Ti)O3 薄膜
DOI：
10.1002/ecj.12051
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发表时间：
2018
影响因子：
0.3
通讯作者：
K. Maenaka
中科院分区：
文献类型：
--
作者：
Shoma Nakamoto;Ryo Sano;K. Kanda;T. Fujita;K. Maenaka
在这项研究中，我们已经制作了由两层和四层Pb（Zr，Ti）O3薄膜与内部电极通过溅射沉积。这些膜的超声换能器的电气和驱动特性进行了评价。通过增加层数，减少了静态位移。然而，对于多层膜，动态位移变得很大，因为大的机械Q因子共振。估计超声换能器的发射声压级和特性。
In this study, we have fabricated membranes which are composed of two‐ and four‐layer Pb(Zr,Ti)O3 thin films with internal electrodes by using sputtering depositions. Electrical and driving characteristics as ultrasonic transducers of these membranes are evaluated. By increasing number of layers, the static displacement is reduced. However, for the multilayered membrane, the dynamic displacement became large because of the large mechanical Q factor in resonant vibration. The emitted sound pressure level and characteristics of the ultrasonic transducer are estimated.