Ultra-thin atomic-layer deposited alumina incorporating silica sol makes ultra-durable antireflection coatings
Ultra-thin atomic-layer deposited alumina incorporating silica sol makes ultra-durable antireflection coatings
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DOI：
10.1063/1.4764332
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发表时间：
2012-11
影响因子：
3.2
通讯作者：
Jia Li;P. Lan;Hua Xu;Xianpeng Zhang;Ye Yang;R. Tan;O. Jylhä;Yuehui Lu
中科院分区：
文献类型：
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作者：
Jia Li;P. Lan;Hua Xu;Xianpeng Zhang;Ye Yang;R. Tan;O. Jylhä;Yuehui Lu
我们提出了一种策略，使钠钙玻璃在严酷的高温和潮湿环境中既保持高透明度，又保持长期耐久性。实验表明，采用溶胶-凝胶浸渍镀膜法和原子层沉积法(ALD)分别制备了厚度为110 nm的SiO_2和厚度为25 nm或50 nm的超薄Al_2O_3双层薄膜，其Tave(400~700 nm波长的平均透过率)比裸玻璃提高了5.88~6.32%。另一方面，高加速温湿度应力测试(HAST)证实，两个样品都可以承受180 h的测试，而透过率没有任何已证实的退化，而裸玻璃的归一化Tave在108 h后急剧下降到初始值的43.1%。结果表明，ALD法制备的超薄Al_2O_3薄膜，再加上SiO_2等低折射率薄膜或纳米结构薄膜，可以获得较高的平均透过率和较好的耐久性能。
We propose a strategy to make soda-lime glass maintain both high transparency and long-term durability in stringent high temperature and humid environments. Experiments reveal that the double-layered coatings with 110-nm-thick SiO2 and ultra-thin 25-nm- or 50-nm-thick Al2O3 layers, prepared by sol-gel dip coating and atomic layer deposition (ALD), respectively, exhibit the improvement of 5.88–6.32% in Tave (the average transmittance from the wavelength of 400–700 nm), as compared with that of the bare glass. On the other hand, the highly accelerated temperature and humidity stress test (HAST) confirms that both samples can sustain the 180 h test without any proven transmittance degradation, while the normalized Tave of the bare glass drastically drops to 43.1% of the initial value after the 108 h HAST. It implies that the ultra-thin Al2O3 films prepared by ALD, followed by dip-coated low-index layers such as SiO2 or nanostructured layer, can achieve both higher average transmittance and better durability,...